r-terpinene 不旋松油精
radial brick 輻形磚
radial temperature uniformity 徑向溫度均一性
radiant arc furnace 輻射電弧爐
radical 基
Radio frequency linac accelerator 高頻線性加速器
Radio frequency lines accelerator 高頻線性加速器
radio frequency quadrapole accelerator 高頻四重極加速器
radio frequency workcoil 高頻工作線圈
radio-frequency heating 射頻加熱
radition shield 輻射屏障
ram 撞鎚
ramming material 鎚結(jié)料
ramp rate 升降溫速度/斜坡率
ramp up 傾斜升溫，每單位時間之溫度上升
ramp voltage test 斜坡電壓測試
rank marking 按等級標(biāo)印
rapid cooling system 急冷系統(tǒng)
rapid mixing chamber 快速混合槽
rapid sand filter 快速砂礫過濾器
rapid thermal process 快速熱處理
rapid-hardening Portland cement 快硬[卜特蘭] 水泥
rare earths 稀土
Raschig ring 拉西環(huán)
rate 比率
rated output power of ultrasonic generator 超音波產(chǎn)生器額定輸出
ratio of crucible shaft driving speed 坩堝軸驅(qū)動速度比率
rational analysis 示性分析
raw glaze 生料釉
raw material 原料
RC parameter extractionRC  參數(shù)萃取
RCA cleaning methodRCA 洗條法
reaction chamber/ reactor 反應(yīng)室/反應(yīng)器
reaction tube 反應(yīng)管
reactive ion beam etching system/RIBE system 反應(yīng)性離子束蝕刻系統(tǒng)
reactive ion etching system/RIE system 反應(yīng)性離子蝕刻系統(tǒng)/RIE 系統(tǒng)
reactive sputter etching system 反應(yīng)性濺鍍蝕刻系統(tǒng)
reactive sputtering system 反應(yīng)性濺鍍系統(tǒng)
real chip simulator 實際晶片模擬器
Real Time timing control 及時定時控制
real-time redundancy judgement function 即時冗余判斷功能
ream 斑紋
reboil 再沸
receiver 接受匣盒
recharge CZ method 再補充CZ  法
recipe 處理程式　
reclaim 再生
reclaim wafer 回收晶圓
recognition rate 識別率
reconfigurable logic 可從構(gòu)邏輯
rectangular kiln 長方窯
recuperator 復(fù)熱器
red clay 紅黏土
reduced instruction set computer（RISC） 精簡指令集電腦
reduced pressure controller 減壓控制器
reduced pressure method 減壓法
reduced pressure vapor phase epitaxial growth system 減壓汽相磊晶生長系統(tǒng)
reduced presure vapor phase epitaxial growth system 減壓汽相磊晶生長系統(tǒng)
reducing atomosphere 還原蒙氣
redundancy analyzer 冗余分析儀
redundancy function 多余功能，冗余功能
redundant memory repair system 冗余記憶器檢修系統(tǒng)
reel 卷筒
reference plane 基準(zhǔn)面
reference source 基準(zhǔn)信號電源
refining 凈化
refining speed 精練速度
reflection high energy electron diffraction method 反射高能電子繞射法
reflow 圓滑熱處理，平坦化熱處理技術(shù) 　
refractoriness 耐火性；耐火度
refractoriness underload 載重耐火度　
refractory coating 耐火涂料
refractory concrete 耐火混凝土
refractory material 耐火材料
refreactory cement 耐火水泥
refresh function 刷新功能；再生功能
regenerator 蓄熱器
register transfer level description 暫存器傳送位階記述
register transfer level floor plan 暫存器傳送層級平面圖
register transfer level sign offRTL（ 暫存器傳送位階）簽字保證
registration accuracy 重合精確度
reheat test 再熱試驗
reinforced brickwork 加強磚工
relative humidity 相對濕度
relieving arch 肋拱
remaining gate 殘留閘門
remaining resin 殘留樹脂
remaining tie bar 殘留腳端聯(lián)結(jié)桿
repressing 再壓
residual air 殘留空氣
residual chlorine meter 殘留氯氣測試計
residual clay 殘余黏土
resin cutting 樹脂切割
resinoid grinding wheel 熟化樹脂研磨輪
resist ashing system 抗轉(zhuǎn)劑灰化系統(tǒng)
resist curing system 抗蝕劑熟化系統(tǒng)
resist ozone asher 抗蝕劑臭氧灰化機
resist plasma ashing system 等離子體抗蝕劑灰化系統(tǒng)
resist processing equipment 抗蝕劑處理設(shè)備
resist stripper 抗蝕劑剝離液
resist stripping system 抗蝕劑剝離系統(tǒng)
resist temperature control 抗蝕劑溫度控制
resist thermal stability 抗蝕劑熱穩(wěn)定性
resist thickness uniformity 抗蝕劑膜厚均質(zhì)性
resistance heading furnace 電阻加熱爐
resistance heating element 電阻加熱元件
resistance heating evaporation system 電阻加熱真控蒸鍍系統(tǒng)
resistance heating method 電阻加熱法　
resistivity 電阻系數(shù)
resolution 解析度，析像清晰度
resolving aperture 監(jiān)別孔隙
retarder 阻湊劑
reticle alignment 標(biāo)線片對準(zhǔn)
reticle blind 標(biāo)線片遮簾
reticle holder 標(biāo)線片固定器
reticle loader 標(biāo)線片搭載器
reticle rotation error 標(biāo)線旋轉(zhuǎn)誤差
reticle stage 標(biāo)線片載物臺
reusable design 再利用設(shè)計
reverse bonding 逆向接合，逆向壓接
reverse motion 反向動作
reverse synthesis 逆向合成
revolution mark 旋轉(zhuǎn)標(biāo)痕
revolution speed set up time 旋轉(zhuǎn)速度建立時間
revolver gress 旋壓機
revolving pot 迥轉(zhuǎn)罐
revolving screen 迥轉(zhuǎn)篩
RF diode sptuttering system 高頻二極管濺鍍系統(tǒng)
RF electrode 高頻施加電極
RF generator 高頻產(chǎn)生器`
RF plasma enhanced CVD system 高頻等離子體增強CVD 系統(tǒng)
rheology 流變學(xué)
rib 肋骨;加肋,加強筋
ribbed roof 助頂
rider brick 鞍磚；鞍拱
ridge 隆起物
ridge tile 脊瓦
ring 浮圈(玻)；環(huán)(玻)；匣缽圈(陶)
ring blade 環(huán)形刀片
rise 拱高
robot for using in vacuum 真空機械人
robotic transporter 機械人輸送機
rock crystal 水晶
rock wool 巖絨
rocket nozzle 火箭噴嘴
Rockwell hardness 洛氏硬度
rod mill 桿磨
roll crusher 輥碎機(從化工)
rolled glass 輥制玻璃
roller 滾筒，山刷滾輪
roller-bat machine 輥片機
roller-head machine 輥頭旋坯機
ROM test data memoryROM 測試數(shù)據(jù)記憶器
roman cement 羅馬水泥
Roman tile 羅馬瓦
roofing tile 屋瓦 　
rotary and revolutionary jig 自轉(zhuǎn)公轉(zhuǎn)夾具
rotary disk feeder 旋盤飼料機
rotary head bonder 旋轉(zhuǎn)壓接頭接合機
rotary kiln 旋窯
rotary screen 旋篩
rotary smelter 旋轉(zhuǎn)熔煉爐
rotary-hearth kiln 轉(zhuǎn)床窯
rotating ingot slicing machine 晶錠旋轉(zhuǎn)切割機
rotating speed 轉(zhuǎn)盤旋轉(zhuǎn)速度
rotation speed 自旋馬達之回轉(zhuǎn)數(shù)
rotational implant 旋轉(zhuǎn)式〈離子〉植入
rotor turn table 轉(zhuǎn)子轉(zhuǎn)盤
rouge 鐵紅
rouge flambe 祭紅釉
rough-cast 輥花玻璃
round kiln 圓窯
rowlock 立砌法
royal blue 寶藍
RTA  (Rapid Thermal Annealing)快速退火爐
rubber 橡膠
r rubbing block 磨擦石
ruby glass 金紅玻璃
run out 產(chǎn)生誤差
runner 熔流道；橫澆道
runner brick 澆道磚
runner stop 樹脂流道口堵塞物
rust-spotting 銹斑
rustic brick 粗面磚
Rutherford backscattering method 盧瑟福後向散射法
rutile 金紅石